A number of reactive plasmas contain negative ions, which dramatically change plasma physics. We study sheath (potential structures formed between a plasma and a material) which is important in semiconductor process and probe measurement.

Similarity of Sheaths and Shocks in Negative-Ion Plasmas

We consider that in negative-ion plasmas, shock waves having negative potential fluctuation and sheath can be described similar theories. If this is the case, research on negative shocks will hopefully contribute to define the physics of sheath in negative-ion plasmas.


Double plasma device and signals of negative shocks

○Ion Acoustic Shocks with a Negative Potential Fluctuation - Relation to Sheath Physics -
R. Ichiki, S. Kanazawa, and Y. Kawai
Technical Meeting, IEE Japan, PST-13-090 (2013)
PDF file

Measurement of Negative-Ion Plasmas with Simple Langmuir Probe Methods

We pursue possibility to measure physical parameters of reactive plasmas.

○Estimation of Negative Ions in VHF SiH4/H2 Plasma
T. Yamane, S. Nakano, S. Nakao, Y. Takeuchi, R. Ichiki, H. Muta, K. Uchino, and Y. Kawai
Japanese Journal of Applied Physics 53, 116101 (2014)

○Characteristics of Folating Potential in Negative Ion Plasma
J. Y. Zhang, R. Ichiki, K. Uchino, and Y. Kawai
Plasma Processes and Polymers 11, 545 (2014)

○Measurements of SiH4/H2 VHF Plasma Parameters with Heated Langmuir Probe
T. Yamane, S. Nakano, Y. Takeuchi, H. Muta, R. Ichiki, K. Uchino, and Y. Kawai
Contributions to Plasma Physics 53, 588 (2013)
Updated in 27 Feb 2015
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